2017 07 TransducersFerdous, S.; Nefzaoui, E.; Regina, H.; Cesar, W.; Marty, F.; Capochichi-Gnambodoe, M.; Poulichet, P.; Basset, P.; Peressuti, F.; Sarkar, S.; Bourouina, T., “Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp.1069-Transducers 2017”, july-17

Motivated by the need for a multi-parameter sensing chip for water networks monitoring, we address here the specific case of a flow-rate sensor where the main challenge is the substrate material. Instead of using conventional low thermal conductivity materials such as glass, silicon has to be used. Indeed, a silicon substrate enables the co-integration of various kinds of sensors on the same chip as reported in this contribution. However, it increases the flow-rate sensor power consumption due to larger thermal leaks. We therefore design and study an optimized low power micro-machined thermal flow-rate sensor based on a silicon substrate and operating according to hot-wire anemometry. It can be considered as an alternative to other well established sensors for liquid flow-rate measurement when both the use of a silicon substrate and a low power consumption are needed. Learn more